A high-accuracy system supporting verification of critical dimensions, geometric tolerances and complex surfaces through controlled measurement programs.
| Length error | MPEE = (1,7 + 3L/1000) µm |
|---|---|
| Max. drive speed | 519 mm/s |
| Max. acceleration | 2.309 mm/s² |
| Temperature compensation | 16–26 °C |
| Guidance | Air bearing on each axis |
| Primary use | Dimensional and geometric verification |